Rapid thermal annealing effects on the electrical behavior of plasma oxidized silicon/silicon nitride stacks gate insulators
- San Andrés, E.
- Del Prado, A.
- Mártil, I.
- González-Díaz, G.
- Martínez, F.L.
ISSN: 1071-1023
Year of publication: 2003
Volume: 21
Issue: 4
Pages: 1306-1313
Type: Conference paper