Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis

  1. Martínez, F.L.
  2. Toledano, M.
  3. San Andrés, E.
  4. Mártil, I.
  5. González-Díaz, G.
  6. Bohne, W.
  7. Röhrich, J.
  8. Strub, E.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2006

Volume: 515

Issue: 2 SPEC. ISS.

Pages: 695-699

Type: Article

DOI: 10.1016/J.TSF.2005.12.239 GOOGLE SCHOLAR
Data source: Scopus