Characterization of nitrogen-rich silicon nitride films grown by the electron cyclotron resonance plasma technique
- Wang, L.
- Reehal, H.S.
- Martínez, F.L.
- San Andrés, E.
- Del Prado, A.
ISSN: 0268-1242
Argitalpen urtea: 2003
Alea: 18
Zenbakia: 7
Orrialdeak: 633-641
Mota: Artikulua