Characterization of nitrogen-rich silicon nitride films grown by the electron cyclotron resonance plasma technique
- Wang, L.
- Reehal, H.S.
- Martínez, F.L.
- San Andrés, E.
- Del Prado, A.
ISSN: 0268-1242
Année de publication: 2003
Volumen: 18
Número: 7
Pages: 633-641
Type: Article