Thermally induced changes in the optical properties of SiNx:H films deposited by the electron cyclotron resonance plasma method
- Martínez, F.L.
- Del Prado, A.
- Mártil, I.
- González-Díaz, G.
- Selle, B.
- Sieber, I.
ISSN: 0021-8979
Year of publication: 1999
Volume: 86
Issue: 4
Pages: 2055-2061
Type: Article