Publicacións nas que colabora con María Jesús Hernández Lucas (4)

1999

  1. Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

    Journal of Materials Science: Materials in Electronics, Vol. 10, Núm. 5, pp. 393-398

1997

  1. Compositional and electrical properties of ECR-CVD silicon oxynitrides

    Semiconductor Science and Technology, Vol. 12, Núm. 7, pp. 927-932