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Desarrollo de Sistemas y Circuitos Electrónicos y Microelectrónicos
DECIMIC
Enrique
San Andres Serrano
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Enrique San Andres Serrano
Publications by the researcher in collaboration with Enrique San Andres Serrano (1)
2004
Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method
Thin Solid Films
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