Optical absorption in amorphous hydrogenated silicon nitride thin films deposited by the electron cyclotron resonance plasma method and subjected to rapid thermal annealing

1. Martínez, F.L.
2. Mártil, I.
3. González-Díaz, G.
4. Bernal-Oliva, A.M.
5. González-Leal, J.M.
6. Márquez, E.