Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry

  1. Strass, A.
  2. Bieringer, P.
  3. Hansch, W.
  4. Fuenzalida, V.
  5. Alvarez, A.
  6. Luna, J.
  7. Martil, I.
  8. Martinez, F.L.
  9. Eisele, I.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1999

Volume: 349

Issue: 1-2

Pages: 135-146

Type: Article

DOI: 10.1016/S0040-6090(99)00166-2 GOOGLE SCHOLAR
Data source: Scopus