Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry

  1. Strass, A.
  2. Bieringer, P.
  3. Hansch, W.
  4. Fuenzalida, V.
  5. Alvarez, A.
  6. Luna, J.
  7. Martil, I.
  8. Martinez, F.L.
  9. Eisele, I.
Aldizkaria:
Thin Solid Films

ISSN: 0040-6090

Argitalpen urtea: 1999

Alea: 349

Zenbakia: 1-2

Orrialdeak: 135-146

Mota: Artikulua

DOI: 10.1016/S0040-6090(99)00166-2 GOOGLE SCHOLAR