Electrical properties of electron cyclotron resonance plasma-deposited silicon dioxide: Effect of the oxygen to silane flow ratio
- Hernandez, M.J.
- Garrido, J.
- Martinez, J.
- Piqueras, J.
ISSN: 0268-1242
Année de publication: 1996
Volumen: 11
Número: 3
Pages: 422-426
Type: Article