Hydrogen incorporation and crystallization of nanocrystalline silicon deposited by electron cyclotron resonance plasmas

  1. Holgado, S.
  2. Martínez, J.
  3. Garrido, J.
  4. Piqueras, J.
Journal:
Journal of the Electrochemical Society

ISSN: 0013-4651

Year of publication: 1999

Volume: 146

Issue: 5

Pages: 1966-1970

Type: Article

DOI: 10.1149/1.1391874 GOOGLE SCHOLAR
Data source: Scopus