Amorphous SiC layers deposited by electron cyclotron resonance plasma: spectroscopic ellipsometric measurements
- Gomez, F.J.
- Martinez, J.
- Garrido, J.
- Gomez-Aleixandre, C.
- Piqueras, J.
ISSN: 0022-3093
Année de publication: 1995
Volumen: 191
Número: 1-2
Pages: 164-173
Type: Article