![Foto de María Jesús](/img/nophoto.png)
María Jesús
Hernández Lucas
Publicaciones en las que colabora con María Jesús Hernández Lucas (4)
1999
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Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma
Journal of Materials Science: Materials in Electronics, Vol. 10, Núm. 5, pp. 393-398
1997
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Compositional and electrical properties of ECR-CVD silicon oxynitrides
Semiconductor Science and Technology, Vol. 12, Núm. 7, pp. 927-932
1996
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Electrical properties of electron cyclotron resonance plasma-deposited silicon dioxide: Effect of the oxygen to silane flow ratio
Semiconductor Science and Technology, Vol. 11, Núm. 3, pp. 422-426
1994
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Kinetics and Compositional Dependence on the Microwave Power and SiH4/N2 Flow Ratio of Silicon Nitride Deposited by Electron Cyclotron Resonance Plasmas
Journal of the Electrochemical Society, Vol. 141, Núm. 11, pp. 3234-3237