Publicacións nas que colabora con María Jesús Hernández Lucas (4)

1999

  1. Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

    Journal of Materials Science: Materials in Electronics, Vol. 10, Núm. 5, pp. 393-398

1997

  1. Compositional and electrical properties of ECR-CVD silicon oxynitrides

    Semiconductor Science and Technology, Vol. 12, Núm. 7, pp. 927-932

1996

  1. Electrical properties of electron cyclotron resonance plasma-deposited silicon dioxide: Effect of the oxygen to silane flow ratio

    Semiconductor Science and Technology, Vol. 11, Núm. 3, pp. 422-426

1994

  1. Kinetics and Compositional Dependence on the Microwave Power and SiH4/N2 Flow Ratio of Silicon Nitride Deposited by Electron Cyclotron Resonance Plasmas

    Journal of the Electrochemical Society, Vol. 141, Núm. 11, pp. 3234-3237