Optical and structural properties of SiOxNyHz films deposited by electron cyclotron resonance and their correlation with composition

1. Del Prado, A.
2. Andrés, E.S.
3. Mártil, I.
4. González-Diaz, G.
5. Bravo, D.
6. López, F.J.
7. Bohne, W.
8. Röhrich, J.
9. Selle, B.
10. Martínez, F.L.

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DOI: 10.1063/1.1566476 GOOGLE SCHOLAR lock_openOpen access editor

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