Optical and structural properties of SiOxNyHz films deposited by electron cyclotron resonance and their correlation with composition

  1. Del Prado, A.
  2. Andrés, E.S.
  3. Mártil, I.
  4. González-Diaz, G.
  5. Bravo, D.
  6. López, F.J.
  7. Bohne, W.
  8. Röhrich, J.
  9. Selle, B.
  10. Martínez, F.L.
Revue:
Journal of Applied Physics

ISSN: 0021-8979

Année de publication: 2003

Volumen: 93

Número: 11

Pages: 8930-8938

Type: Article

DOI: 10.1063/1.1566476 GOOGLE SCHOLAR lock_openAccès ouvert editor
La source de données: Scopus