Optical and structural properties of SiOxNyHz films deposited by electron cyclotron resonance and their correlation with composition
- Del Prado, A.
- Andrés, E.S.
- Mártil, I.
- González-Diaz, G.
- Bravo, D.
- López, F.J.
- Bohne, W.
- Röhrich, J.
- Selle, B.
- Martínez, F.L.
ISSN: 0021-8979
Argitalpen urtea: 2003
Alea: 93
Zenbakia: 11
Orrialdeak: 8930-8938
Mota: Artikulua