Defect structure of SiNx:H films and its evolution with annealing temperature

  1. Martínez, F.L.
  2. Del Prado, A.
  3. Mártil, I.
  4. Bravo, D.
  5. López, F.J.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 2000

Volume: 88

Issue: 4

Pages: 2149-2151

Type: Article

DOI: 10.1063/1.1305548 GOOGLE SCHOLAR
Data source: Scopus