Defect structure of SiNx:H films and its evolution with annealing temperature

  1. Martínez, F.L.
  2. Del Prado, A.
  3. Mártil, I.
  4. Bravo, D.
  5. López, F.J.
Revue:
Journal of Applied Physics

ISSN: 0021-8979

Année de publication: 2000

Volumen: 88

Número: 4

Pages: 2149-2151

Type: Article

DOI: 10.1063/1.1305548 GOOGLE SCHOLAR

Objectifs de Développement Durable