Compositional and electrical properties of ECR-CVD silicon oxynitrides

  1. Hernandez, M.J.
  2. Garrido, J.
  3. Martinez, J.
  4. Piqueras, J.
Journal:
Semiconductor Science and Technology

ISSN: 0268-1242

Year of publication: 1997

Volume: 12

Issue: 7

Pages: 927-932

Type: Article

DOI: 10.1088/0268-1242/12/7/027 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus