Scanning electron beam annealing of sputter-deposited titanium on silicon
- Cervera, M.
- Climent-Font, A.
- Garrido, J.
- Martínez, J.
- Perrière, J.
ISSN: 0168-583X
Year of publication: 1996
Volume: 118
Issue: 1-4
Pages: 733-738
Type: Article
ISSN: 0168-583X
Year of publication: 1996
Volume: 118
Issue: 1-4
Pages: 733-738
Type: Article