Scanning electron beam annealing of sputter-deposited titanium on silicon

  1. Cervera, M.
  2. Climent-Font, A.
  3. Garrido, J.
  4. Martínez, J.
  5. Perrière, J.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 1996

Alea: 118

Zenbakia: 1-4

Orrialdeak: 733-738

Mota: Artikulua

DOI: 10.1016/0168-583X(96)80118-2 GOOGLE SCHOLAR
Datuen iturria: Scopus