Amorphous SiC layers deposited by electron cyclotron resonance plasma: spectroscopic ellipsometric measurements

  1. Gomez, F.J.
  2. Martinez, J.
  3. Garrido, J.
  4. Gomez-Aleixandre, C.
  5. Piqueras, J.
Journal:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Year of publication: 1995

Volume: 191

Issue: 1-2

Pages: 164-173

Type: Article

DOI: 10.1016/0022-3093(95)00284-7 GOOGLE SCHOLAR
Data source: Scopus