Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

  1. Hernández, M.J.
  2. Cervera, M.
  3. Garrido, J.
  4. Martínez, J.
  5. Piqueras, J.
Journal:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Year of publication: 1999

Volume: 10

Issue: 5

Pages: 393-398

Type: Article

DOI: 10.1023/A:1008985125423 GOOGLE SCHOLAR
Data source: Scopus