Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

  1. Hernández, M.J.
  2. Cervera, M.
  3. Garrido, J.
  4. Martínez, J.
  5. Piqueras, J.
Aldizkaria:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Argitalpen urtea: 1999

Alea: 10

Zenbakia: 5

Orrialdeak: 393-398

Mota: Artikulua

DOI: 10.1023/A:1008985125423 GOOGLE SCHOLAR
Datuen iturria: Scopus