Publications by the researcher in collaboration with Manuel Cervera Goy (5)

1999

  1. Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

    Journal of Materials Science: Materials in Electronics, Vol. 10, Núm. 5, pp. 393-398

1996

  1. Scanning electron beam annealing of sputter-deposited titanium on silicon

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 118, Núm. 1-4, pp. 733-738

  2. Temperature evolution during scanning electron beam processing of silicon

    Applied Physics A: Materials Science and Processing, Vol. 62, Núm. 5, pp. 451-457