Manuel Cervera Goy-rekin lankidetzan egindako argitalpenak (5)

1999

  1. Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

    Journal of Materials Science: Materials in Electronics, Vol. 10, Núm. 5, pp. 393-398

1996

  1. Scanning electron beam annealing of sputter-deposited titanium on silicon

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 118, Núm. 1-4, pp. 733-738

  2. Temperature evolution during scanning electron beam processing of silicon

    Applied Physics A: Materials Science and Processing, Vol. 62, Núm. 5, pp. 451-457