Temperature evolution during scanning electron beam processing of silicon

  1. Cervera, M.
  2. Martínez, J.
  3. Garrido, J.
  4. Piqueras, J.
Journal:
Applied Physics A: Materials Science and Processing

ISSN: 0947-8396

Year of publication: 1996

Volume: 62

Issue: 5

Pages: 451-457

Type: Article

DOI: 10.1007/BF01567116 GOOGLE SCHOLAR
Data source: Scopus