Temperature evolution during scanning electron beam processing of silicon

  1. Cervera, M.
  2. Martínez, J.
  3. Garrido, J.
  4. Piqueras, J.
Revue:
Applied Physics A: Materials Science and Processing

ISSN: 0947-8396

Année de publication: 1996

Volumen: 62

Número: 5

Pages: 451-457

Type: Article

DOI: 10.1007/BF01567116 GOOGLE SCHOLAR
La source de données: Scopus