Felix Lorenzo
Martínez Viviente
Catedrático de Universidad
Ignacio
Mártil de la Plaza
Ignacio Mártil de la Plaza-rekin lankidetzan egindako argitalpenak (27)
2008
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Physical properties of high pressure reactively sputtered hafnium oxide
Vacuum, Vol. 82, Núm. 12, pp. 1391-1394
2007
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High-pressure reactively sputtered Hf O2: Composition, morphology, and optical properties
Journal of Applied Physics, Vol. 102, Núm. 4
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Optical properties and structure of HfO2 thin films grown by high pressure reactive sputtering
Journal of Physics D: Applied Physics, Vol. 40, Núm. 17, pp. 5256-5265
2006
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Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis
Thin Solid Films, Vol. 515, Núm. 2 SPEC. ISS., pp. 695-699
2004
2003
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Microstructural modifications induced by rapid thermal annealing in plasma deposited SiOxNyHz films
Journal of Applied Physics, Vol. 94, Núm. 2, pp. 1019-1029
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Optical and structural properties of SiOxNyHz films deposited by electron cyclotron resonance and their correlation with composition
Journal of Applied Physics, Vol. 93, Núm. 11, pp. 8930-8938
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Rapid thermal annealing effects on the electrical behavior of plasma oxidized silicon/silicon nitride stacks gate insulators
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Rapid thermally annealed plasma deposited SiNx:H thin films: Application to metal-insulator-semiconductor structures with Si, In 0.53Ga0.47 As, and InP
Journal of Applied Physics, Vol. 94, Núm. 4, pp. 2642-2653
2002
2001
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Characterization of polycrystalline Cu(In,Ga)Te2 thin films prepared by pulsed laser deposition
Thin Solid Films, Vol. 394, Núm. 1-2, pp. 23-28
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Electrical properties of rapid thermally annealed SiNx:H/Si structures characterized by capacitance-voltage and surface photovoltage spectroscopy
Semiconductor Science and Technology, Vol. 16, Núm. 7, pp. 534-542
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Molecular models and activation energies for bonding rearrangement in plasma-deposited (formula presented) dielectric thin films treated by rapid thermal annealing
Physical Review B - Condensed Matter and Materials Physics, Vol. 63, Núm. 24
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Molecular models and activation energies for bonding rearrangement in plasma-deposited α-SiNx: H dielectric thin films treated by rapid thermal annealing
Physical Review B - Condensed Matter and Materials Physics, Vol. 63, Núm. 24, pp. 2453201-2453211
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Temperature effects on the electrical properties and structure of interfacial and bulk defects in Al/SiNx:H/Si devices
Journal of Applied Physics, Vol. 90, Núm. 3, pp. 1573-1581
2000
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Compositional analysis of amorphous SiNx:H films by ERDA and infrared spectroscopy
Surface and Interface Analysis, Vol. 30, Núm. 1, pp. 534-537
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Defect structure of SiNx:H films and its evolution with annealing temperature
Journal of Applied Physics, Vol. 88, Núm. 4, pp. 2149-2151
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Rapid thermal annealing effects on the structural properties and density of defects in SiO2 and SiNx: H films deposited by electron cyclotron resonance
Journal of Applied Physics, Vol. 87, Núm. 3, pp. 1187-1192