Publicacións en colaboración con investigadores/as de Universidad Complutense de Madrid (26)

2007

  1. Optical properties and structure of HfO2 thin films grown by high pressure reactive sputtering

    Journal of Physics D: Applied Physics, Vol. 40, Núm. 17, pp. 5256-5265

2000

  1. Compositional analysis of amorphous SiNx:H films by ERDA and infrared spectroscopy

    Surface and Interface Analysis, Vol. 30, Núm. 1, pp. 534-537

  2. Defect structure of SiNx:H films and its evolution with annealing temperature

    Journal of Applied Physics, Vol. 88, Núm. 4, pp. 2149-2151

1999

  1. Effect of substrate temperature in SiOxNy films deposited by electron cyclotron resonance

    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 17, Núm. 4, pp. 1263-1268